Max Maxfield 8/2/2012 6:25:27 AM User Rank Blogger
Re: 1um BEOL thickness ?
@torki: Great -- thanks for this input -- for my paper I was just trying to give a "feel" for it all -- but it's nice to know I was so close -- and if I ever give a talk about this technology, will all of the info provided by everyone's feedback I will be able to nail the numbers :-)
At 28nm Mx (1 to 6) stack is about 6 times 180nm (metal and via). So this is indeed 1.08 micron. The mid-thick metal is 400nm (metal and via) The thick metal is 1480nm (metal and via)
Hi Max! I like your 'about 1 um'. Looking at the ITRS 2011 BEOL roadmap for MPUs (logic) Table IITC2 year 2012 (22nm node), metal 1 is 58nm thick, the intermediate metal layers (say #2 & #3) are either 115nm or 230nm (if 2X for ASICs), and global metal layers (say #4 & #5) are either 123nm or 492nm (if 4X for ASICs). Then adding it all up we get a range from 518nm to 1502nm; so 1.0+/-0.5um for the 5 layers of metal covers it. You are 'Magnificent'!
Max Maxfield 7/30/2012 9:27:29 AM User Rank Blogger
Re: Thermal could begain to be an issue at higher layer counts
@William: I agree -- heat is always a problem -- it's going to be interesting to see where this goes -- if people start using the technology in earnest then tool development will ramp up also.
The appellation "primary colors" refers to a small collection of colors that can be combined to form a range of additional colors, but which "small collection of colors" should we use as our primaries?
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